Presentations

Exploring the Crucial Role of Mask3D-induced Imaging Mechanisms in High- and Hyper-NA EUV Lithography: A Study of the Near- and Far-field of the Diffracted Light
by A. Erdmann et al.

Exploring the Limits of High Contrast Contact Imaging Using Split Pupil Exposures in High-NA EUV Lithography
by A. Erdmann et al.

3D Mask Simulation and Lithographic Imaging using Physics-informed Neural Networks
by V. Medvedev et al.

Challenges of Junction Temperature Calibration of SiC MOSFETs for Power Cycling – a Dynamic Approach
by J. Breuer et al.

Milliseconds Power Cycling (PCmsec) Driving Bipolar Degradation in Silicon Carbide Power Devices
by S. Laha et al.

Modified Approach for the Rainflow Counting Analysis of Temperature Load Signals in Power Electronics Modules
by S. Letz et al.

Wide Bandwidth PCB Rogowski Coil Current Sensor with Droop Suppression and DC Restoration for In-Situ Inverter Measurements
by S. Quergfelder et al.

Concept for a GaN-based Intelligent Motor Controller with Integrated Failure Prediction for the Inverter and the Drive
by M. Schellenberger et al.

Evaluation of Semiconductor-based Isolation for Electric Vehicle Chargers in DC Microgrids
by K. Drexler et al.

Novel Device for Fast Detection and Limitation of Short-circuit Currents in LVDC Grids
by J. Gehring et al.

Exploration of Use-case-dependent Modeling Approach for Distributed DC Grids
by M. Lavery et al.

DC-Microgrid Application, Use Cases and Standardization in Europe
by B. Wunder

Gate Oxide Performance and Reliability on SmartSiC TM Wafers and the Influence of RTA Processing on Gate Oxide Lifetime
by T. Becker et al.

Formation of Structured Low-ohmic p-type Contacts on Al-implanted 4H-SiC by Laser Annealing
by C. Hellinger et al.

Determining Compensation of Implanted Aluminum Dopants by Simultaneous Fitting of Charge Carrier Concentration and Mobility
by J. Kauth et al.

On the Relationship of Processing Parameters and Epitaxial Defects to Extrinsic Failure in SiC Gate Oxide
by H. Schlichting et al.