Our joint lab with Semilab ZRT now enables us to cover the complete portfolio for metrology and inspection for wide-bandgap wafers - from epitaxy to processed devices:
 

• surface roughness with atomic force microscopy (AFM)
• spreading resistance profiling with advanced point contact IV-techniques
• non-contact resistivity and minority carrier lifetime measurement with eddy current and µPCD
• non-contact and non-damaging monitoring of ion implantation parameters via PMR
• quantitative analysis utilizing enhanced infrared reflectometry and ellipsometry
• polarised stress imaging (PSI) detection of crystalline defects
• non-contact, non-destructive corona based CV-techniques

We celebrated this milestone with a big metrology workshop for wide-bandgap materials and welcomed guests from the European compound / SiC & GaN semiconductor industry here at the IISB.