We sincerely congratulate Dr. Peter Evanschitzky from our Modeling and Artificial Intelligence Department on winning the LZE Prize 2024! The electrical engineer received the award for his significant improvements to the mask solver for the Dr.LiTHO simulation software. The software developed at Fraunhofer IISB is used by leading semiconductor manufacturers as well as producers of lithographic and optical systems. With the upgrade that Dr.LiTHO users will benefit from, Dr.LiTHO is significantly superior to other software solutions in terms of computing time, memory requirements and flexibility.
Peter Evanschitzky succeeded in implementing a rigorous solution to Maxwell's equations without resorting to simplified models and assumptions. With the rigorous-physical mask solver, Dr. Litho users are ideally equipped for future demands, especially considering the constantly increasing complexity and request for ever more detailed and elaborate calculations.

Feel free to contact Dr. Andreas Erdmann, head of the Computational Lithography and Optics group of Fraunhofer IISB, to get more information about Dr.LiTHO.

The LZE Prize by the Leistungszentrum Elektroniksysteme (LZE) is awarded for above-average achievements in the transfer of knowhow from research into application. Together with industry partners and further research institutes, Fraunhofer-Gesellschaft, Fraunhofer IIS, Fraunhofer IISB, and FAU Erlangen-Nürnberg (FAU) have established the LZE as an interface between science and industry.